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Inorganic-infiltrated polymer hybrid thin film resists for advanced lithography
050-9075 Dew Point Meter Based on Graphene Oxide Film Metal-containing nanocomposite lithography resists with enhanced properties for high-performance and cost-effective lithography patterning Background: Lithography-based patterning has been instrumental in achieving the tremendous computational power and high device density possessed by today's...
Published: 8/14/2026
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Updated: 8/14/2026
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Inventor(s):
Ashwanth Subramanian
,
Chang-Yong Nam
,
Jiyoung Kim
,
Aaron Stein
,
Nikhil Tiwale
,
Su Min Hwang
,
Lu Ming
Keywords(s):
Category(s):
Campus > Stony Brook University
Metal-oxide infiltrated organic-inorganic hybrid resistive random-access memory (ReRAM) devices
A resistive switching medium of organic-inorganic hybrid composite films for ReRAM devicesRSS.HDBackground> Background: <Resistive random‑access memory (ReRAM) is a type of memory device which relies on electrochemical processes to control the movement of nanoscale quantities of metal/metal ions across a dielectric/solid electrolyte medium....
Published: 8/14/2026
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Updated: 11/17/2022
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Inventor(s):
Ashwanth Subramanian
Keywords(s):
Category(s):
Technology Classifications > Nanotechnology
,
Campus > Stony Brook University